منابع مشابه
Laser Micro-Raman Spectroscopy of CVD Nanocrystalline Diamond Thin Film
Laser micro-Raman spectroscopy is an ideal tool for assessment and characterization of various types of carbon-based materials. Due to its special optical properties (CrN) coated stainless steel substrates. NCD films have been investigated by laser micro-Raman spectroscopy. The fingerprint of diamond based materials is in the spectral region of 1000-1600 cm-1 in the first order of Raman scatter...
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Steel ball indentation and scratch adhesion testing of hot filament chemical vapour deposited diamond films onto AISI type 316 austenitic stainless steel substrates using two different interlayer systems, namely chromium nitride and borided steel, have been investigated. In order to compare the adhesion of these films with that of a well-known and strongly adherent system, detailed adhesion tes...
متن کاملDeposition of Diamond Films in a Closed Hot Filament CVD System
A closed system hot filament chemical vapor deposition (CVD) reactor has been used to deposit diamond films on silicon substrates. A fixed charge of hydrogen gas is fed into the deposition system until the desired deposition pressure level is reached. A solid graphite cylindrical rod held above the tungsten filament was the carbon source. System parameters for diamond film growth have been dete...
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(1) Departament d'Enginyeria Electrònica. Jordi Girona 1-3, Mòdul C4. Universitat Politècnica de Catalunya (Barcelona, Spain). (2) Departament d'Enginyeria Electrònica. Universitat Rovira i Virgili (Tarragona, Spain). (3) Departament de Física Aplicada i Òptica. Universitat de Barcelona (Barcelona, Spain) Abstract Hydrogenated microcrystalline silicon films obtained at low temperature (150oC-28...
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Due to its extreme hardness, chemical and mechanical stability, large band gap and highest thermal conductivity, poly-crystalline diamond (poly-C) is expected to be an excellent packaging material for biomedical and environmental MEMS devices. A poly-C thin film packaging technology has been developed to explore the application of this novel material on post-MEMS encapsulation packaging process...
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ژورنال
عنوان ژورنال: Journal of the Japan Society for Precision Engineering
سال: 1987
ISSN: 1882-675X,0912-0289
DOI: 10.2493/jjspe.53.1507